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Chemical perspectives of microelectronic materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. /

Chemical perspectives of microelectronic materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / editors, C.R. Abernathy ... [et al.] - Pittsburgh, Pa. : Materials Research Society, c1993 - xv, 727 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 282 . - Materials Research Society symposia proceedings ; v. 282 .

Includes bibliographical references and indexes

ISBN: 9781558991774 1558991778

Subjects--Topical Terms:
Microelectronics--Materials--Congresses
Semiconductors--Congresses
Surface chemistry--Congresses

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