Chemical perspectives of microelectronic materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / editors, C.R. Abernathy ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 282Publication details: Pittsburgh, Pa. : Materials Research Society, c1993Description: xv, 727 p. : ill. ; 24 cmISBN: - 9781558991774
- 1558991778
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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UMPLIB PEKAN | TK7874 .C44 1993 (Browse shelf(Opens below)) | 1 | Available | 0000068312 |
Includes bibliographical references and indexes