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Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. /

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors: Duane S. Boning ... [et al.]. - Warrendale, PA : Materials Research Society, 2003 - xi, 348 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; 767 . - Materials Research Society symposia proceedings ; v. 767 .

Includes bibliographical references and indexes

ISBN: 9781558997042 1558997040

Subjects--Topical Terms:
Microelectronics--Materials--Congresses
Grinding and polishing--Congresses
Metals--Pickling--Congresses
Semiconductors--Surfaces--Congresses
Chemical mechanical planarization--Congresses

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