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Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors: Duane S. Boning ... [et al.].
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 767Publication details: Warrendale, PA : Materials Research Society, 2003Description: xi, 348 p. : ill. ; 24 cmISBN: - 9781558997042
- 1558997040
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB GAMBANG | TK7871 .C44 2003 (Browse shelf(Opens below)) | 1 | Available | 0000068167 |
Includes bibliographical references and indexes