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Principles of microelectromechanical systems /

Principles of microelectromechanical systems / Principles of MEMS edited by Ki Bang Lee - Hoboken, N.J. : Wiley, 2011 - xii, 667 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 9780470466346

Subjects--Topical Terms:
Microelectromechanical systems

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