Principles of microelectromechanical systems / edited by Ki Bang Lee
Material type:
TextPublication details: Hoboken, N.J. : Wiley, 2011Description: xii, 667 p. : ill. ; 25 cmISBN: - 9780470466346
- Principles of MEMS
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
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UMPLIB PEKAN | TK7875 .P75 2011 (Browse shelf(Opens below)) | 1 | Available | 0000062232 |
Includes bibliographical references and index