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Fundamental principles of engineering nanometrology /

Leach, Richard

Fundamental principles of engineering nanometrology / by Richard K. Leach - Oxford, UK : Elsevier Science, 2010 - xxvi, 321 p. : ill. ; 24 cm. - Micro and nano technologies . - Micro and nano technologies .

Includes bibliographical references and index

ISBN: 9780080964546 0080964540

Subjects--Topical Terms:
Nanotechnology
Microtechnology
Metrology

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