Fundamental principles of engineering nanometrology / by Richard K. Leach

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Material type: Text

TextSeries: Micro and nano technologiesPublication details: Oxford, UK : Elsevier Science, 2010Description: xxvi, 321 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB GAMBANG	T174.7 .L43 2010 (Browse shelf(Opens below))	1	Available		0000059230

Includes bibliographical references and index