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Principles of chemical vapor deposition : what's going on inside the reactor /

Dobkin, Daniel Mark

Principles of chemical vapor deposition : what's going on inside the reactor / by Daniel M. Dobkin and Michael K. Zuraw - Boston : Kluwer Academic Publishers, 2003 - xi, 273 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 1402012489

Subjects--Topical Terms:
Vapor-plating
Refractory coating

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