Lithography : main techniques /
Lithography : main techniques /
edited by Stefan Landis
- London : Hoboken, NJ : ISTE ; Wiley, 2011
- xxv, 377 p. : ill. ; 25 cm.
Includes bibliographical references and index
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher
9781848212022 (hardback) 184821202X (hardback)
Microlithography
Includes bibliographical references and index
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher
9781848212022 (hardback) 184821202X (hardback)
Microlithography