Lithography : main techniques / edited by Stefan Landis

Contributor(s):

Landis, Stefan

Material type: Text

TextPublication details: London : ISTE ; Hoboken, NJ : Wiley, 2011Description: xxv, 377 p. : ill. ; 25 cmISBN:

9781848212022 (hardback)
184821202X (hardback)

Subject(s):

Microlithography

Summary: "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher

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Holdings ( 1 )
Title notes ( 2 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7872.M3 L58 2011 (Browse shelf(Opens below))	1	Available		0000059781

Includes bibliographical references and index

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher