Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. /
Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. /
editors by Mark I. Gardner ... [et al.]
- Warrendale, PA : Materials Research Society, c2003
- xiii, 384 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 745 .
- Materials Research Society symposium proceedings .
Includes bibliographical references and index
9781558996823 1558996826
Metal oxide semiconductors--Materials--Congresses
Metal oxide semiconductors, Complementary--Materials--Congresses
Nanostructured materials--Congresses
Gate array circuits--Materials--Congresses
Dielectrics--Congresses
Includes bibliographical references and index
9781558996823 1558996826
Metal oxide semiconductors--Materials--Congresses
Metal oxide semiconductors, Complementary--Materials--Congresses
Nanostructured materials--Congresses
Gate array circuits--Materials--Congresses
Dielectrics--Congresses