Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. / editors by Mark I. Gardner ... [et al.]
Material type:
TextSeries: Materials Research Society symposium proceedingsPublication details: Warrendale, PA : Materials Research Society, c2003Description: xiii, 384 p. : ill. ; 24 cmISBN: - 9781558996823
- 1558996826
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
|
|
UMPLIB PEKAN | TK7871.99.M44 S96 2003 (Browse shelf(Opens below)) | 1 | Available | 0000071803 |
Includes bibliographical references and index