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Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. /

Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / editors, Frank W. DelRio ... [et al.] - New York : Cambridge University Press, 2011 - ix, 207 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 1299 . - Materials Research Society symposia proceedings ; v. 1299 .

Includes bibliographical references and indexes

ISBN: 9781605112763 1605112763

Subjects--Topical Terms:
Microelectromechanical systems--Materials--Congresses
Microelectromechanical systems--Congresses
Thin films--Congresses
Nanostructured materials--Congresses
Silicon--Congresses

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