Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, [2010], Boston, Massachusetts, U.S.A. / editors, Frank W. DelRio ... [et al.]

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Material type: Text

TextSeries: Materials Research Society symposia proceedings ; v. 1299Publication details: New York : Cambridge University Press, 2011Description: ix, 207 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .S96 2010 (Browse shelf(Opens below))	1	Available		0000070757

Includes bibliographical references and indexes