Substrate surface preparation handbook / Max Robertson
Robertson, Max
Substrate surface preparation handbook / Max Robertson - Norwood, MA : Artech House, 2012 - 195 p. : ill. ; 24 cm.
Includes bibliographical references and index
Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry
9781608072132 1608072134
Semiconductors--Surfaces
Epitaxy
Substrate surface preparation handbook / Max Robertson - Norwood, MA : Artech House, 2012 - 195 p. : ill. ; 24 cm.
Includes bibliographical references and index
Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry
9781608072132 1608072134
Semiconductors--Surfaces
Epitaxy