Substrate surface preparation handbook / Max Robertson
Material type:
TextPublication details: Norwood, MA : Artech House, 2012Description: 195 p. : ill. ; 24 cmISBN: - 9781608072132
- 1608072134
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | QC611.S9 R63 2012 (Browse shelf(Opens below)) | 1 | Available | 0000070995 |
Includes bibliographical references and index
Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry