Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan /
Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan /
AMC 2002
editors, Bradley M. Melnick ... [et al.]
- Warrendale, Pa. : Materials Research Society, c2003
- xxiv, 881 p. : ill. ; 24 cm.
- Materials Research Society conference proceedings, 1048-0854 .
- Materials Research Society conference proceedings, .
"This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."
Includes bibliographical references and indexes
9781558997196 1558997199
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses
"This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."
Includes bibliographical references and indexes
9781558997196 1558997199
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses