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Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan / editors, Bradley M. Melnick ... [et al.]
Material type:
TextSeries: Materials Research Society conference proceedingsPublication details: Warrendale, Pa. : Materials Research Society, c2003Description: xxiv, 881 p. : ill. ; 24 cmISBN: - 9781558997196
- 1558997199
- AMC 2002
- Semiconductors -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- Thin films -- Congresses
- Metallic films -- Congresses
- Metallizing -- Congresses
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.85 .A38 2003 (Browse shelf(Opens below)) | 1 | Available | 0000068297 |
"This conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."
Includes bibliographical references and indexes