Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. /
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. /
editors L.A. Clevenger ... [et al.]
- Warrendale, Pa. : Materials Research Society, 2001
- 1 v. (various pagings) : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 611 .
- Materials Research Society symposium proceedings ; v. 611 .
Includes bibliographical references and indexes
9781558995192 1558995196
Integrated circuits--Ultra large scale integration--Materials--Congresses
Silicides--Congresses
Gate array circuits--Congresses
Electric leakage--Congresses
Includes bibliographical references and indexes
9781558995192 1558995196
Integrated circuits--Ultra large scale integration--Materials--Congresses
Silicides--Congresses
Gate array circuits--Congresses
Electric leakage--Congresses