Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A. / editors L.A. Clevenger ... [et al.]

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Material type: Text

TextSeries: Materials Research Society symposium proceedings ; v. 611Publication details: Warrendale, Pa. : Materials Research Society, 2001Description: 1 v. (various pagings) : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874.76 .G38 2001 (Browse shelf(Opens below))	1	Available		0000070265

Includes bibliographical references and indexes