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Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan /

Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang - Pittsburgh, Pa. : Materials Research Society, c1996 - xix, 767 p. : ill. ; 24 cm. - Conference proceedings, 1048-0854 . - Materials Research Society conference proceedings .

Includes bibliographical references and indexes

ISBN: 9781558993419 155899341X

Subjects--Topical Terms:
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Vapor-plating--Congresses
Electrochemical metallizing--Congresses
Dielectrics--Congresses
Titanium nitride--Congresses