Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang
Material type:
TextSeries: Materials Research Society conference proceedingsPublication details: Pittsburgh, Pa. : Materials Research Society, c1996Description: xix, 767 p. : ill. ; 24 cmISBN: - 9781558993419
- 155899341X
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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UMPLIB PEKAN | TK7874.76 .A38 1996 (Browse shelf(Opens below)) | 1 | Available | 0000068315 |
Includes bibliographical references and indexes