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Sputtering materials for VLSI and thin film devices /

Sarkar, Jaydeep

Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar - Norwich, N.Y. : William Andrew, 2014 - x, 603 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9780815515937

Subjects--Topical Terms:
Flat panel displays--Materials
Microelectronics--Materials
Sputtering (Physics)

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