Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar

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Material type: Text

TextPublication details: Norwich, N.Y. : William Andrew, 2014Description: x, 603 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874 .S27 2014 (Browse shelf(Opens below))	1	Available		0000085565

Includes bibliographical references and index