Normal view MARC view ISBD view

Advanced Metallization Conference 2001 (AMC 2001) : proceedings of the conference held October 8-11, 2001, in Montreal, Canada, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. A parallel session of the conference was held October 29-31 in Tokyo, Japan. /

Advanced Metallization Conference 2001 (AMC 2001) : proceedings of the conference held October 8-11, 2001, in Montreal, Canada, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. A parallel session of the conference was held October 29-31 in Tokyo, Japan. / AMC 2001 editors, Andrew J. McKerrow ... [et al] - Warrendale, Pa. : Materials Research Society, c2002 - xxii, 719 p. : ill. ; 24 cm. - Materials Research Society conference proceedings, 1048-0854 . - Materials Research Society conference proceedings, .

Includes bibliographical references and indexes

ISBN: 9781558996700 1558996702

Subjects--Topical Terms:
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses