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Advanced Metallization Conference 2001 (AMC 2001) : proceedings of the conference held October 8-11, 2001, in Montreal, Canada, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. A parallel session of the conference was held October 29-31 in Tokyo, Japan. / editors, Andrew J. McKerrow ... [et al]
Material type:
TextSeries: Materials Research Society conference proceedingsPublication details: Warrendale, Pa. : Materials Research Society, c2002Description: xxii, 719 p. : ill. ; 24 cmISBN: - 9781558996700
- 1558996702
- AMC 2001
- Semiconductors -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- Thin films -- Congresses
- Metallic films -- Congresses
- Metallizing -- Congresses
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.85 .A38 2002 (Browse shelf(Opens below)) | 1 | Available | 0000068296 |
Includes bibliographical references and indexes