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Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. /

Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike - Pittsburgh, PA : Materials Research Society, c1994 - xv, 611 p. : ill. ; 24 cm. - Materials Research Society conference proceedings, 1048-0854 . - Materials Research Society conference proceedings, .

Includes bibliographical references and indexes

ISBN: 9781558992351 1558992359

Subjects--Topical Terms:
Integrated circuits--Ultra large scale integration--Materials--Congresses
Metallic films--Congresses
Vapor deposition--Congresses
Electrochemical metallizing--Congresses