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Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike
Material type:
TextSeries: Materials Research Society conference proceedingsPublication details: Pittsburgh, PA : Materials Research Society, c1994Description: xv, 611 p. : ill. ; 24 cmISBN: - 9781558992351
- 1558992359
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.15.F5 A38 1994 (Browse shelf(Opens below)) | 1 | Available | 0000068307 |
Includes bibliographical references and indexes