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Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS /

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials, and MEMS / editors by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera - 2nd ed. - Waltham, MA : William Andrew, c2012 - xii, 644 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9781437734836 1437734839

Subjects--Topical Terms:
Cathode sputtering (Plating process)--Handbooks, manuals, etc.
Thin films--Handbooks, manuals, etc.

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