Handbook of sputter deposition technology : (Record no. 64700)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01073nam a2200277 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | vtls000067144 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251125093430.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 121128t2012 maua f b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781437734836 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 1437734839 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 201306111111 |
| Level of effort used to assign nonsubject heading access points | jamie |
| -- | 201211281634 |
| -- | ida |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | TS695 .H36 2012 |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of sputter deposition technology : |
| Remainder of title | fundamentals and applications for functional thin films, nanomaterials, and MEMS / |
| Statement of responsibility, etc. | editors by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Waltham, MA : |
| Name of publisher, distributor, etc. | William Andrew, |
| Date of publication, distribution, etc. | c2012 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xii, 644 p. : |
| Other physical details | ill. ; |
| Dimensions | 24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Cathode sputtering (Plating process) |
| Form subdivision | Handbooks, manuals, etc. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Thin films |
| Form subdivision | Handbooks, manuals, etc. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Wasa, Kiyotaka |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kanno, Isaku |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kotera, Hidetoshi |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Cost, normal purchase price | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Cost, replacement price | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Not lost | UMPLIB PEKAN | UMPLIB PEKAN | 04/09/2019 | 499.63 | TS695 .H36 2012 | 0000073391 | 04/09/2019 | 1 | 499.63 | 04/09/2019 | Open Shelf |