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In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors by Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg - Pittsburgh, PA : Materials Research Society, c1990 - xi, 496 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 158 . - Materials Research Society symposium proceedings .

Includes bibliographical references and index

ISBN: 9781558990463 1558990461

Subjects--Topical Terms:
Semiconductors--Etching--Congresses
Semiconductor doping--Congresses
Lasers--Industrial applications--Congresses
Plasma etching--Congresses

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