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In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors by Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg
Material type:
TextSeries: Materials Research Society symposium proceedingsPublication details: Pittsburgh, PA : Materials Research Society, c1990Description: xi, 496 p. : ill. ; 24 cmISBN: - 9781558990463
- 1558990461
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.85 .I57 1990 (Browse shelf(Opens below)) | 1 | Available | 0000071702 |
Includes bibliographical references and index