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Ceramic thick films for MEMS and microdevices /

Dorey, Robert A.

Ceramic thick films for MEMS and microdevices / Robert A. Dorey - Waltham, MA : William Andrew, 2012 - xviii, 191 p. : ill. ; 24 cm. - Micro and nano technologies series .

Includes bibliographical references (p. 183-185) and index

ISBN: 9781437778175 (hbk.) 1437778178 (hbk.)

Subjects--Topical Terms:
Thick-film circuits--Design and construction
Microelectromechanical systems--Design and construction
Nanoelectronics

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