Ceramic thick films for MEMS and microdevices / Robert A. Dorey
Material type:
TextSeries: Micro and nano technologies seriesPublication details: Waltham, MA : William Andrew, 2012Description: xviii, 191 p. : ill. ; 24 cmISBN: - 9781437778175 (hbk.)
- 1437778178 (hbk.)
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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UMPLIB PEKAN | TK7871.15.F5 D67 2012 (Browse shelf(Opens below)) | 1 | Available | 0000073775 |
Includes bibliographical references (p. 183-185) and index