Inertial MEMS : principles and practice /
Kempe, Volker
Inertial MEMS : principles and practice / Volker Kempe - Cambridge : Cambridge University Press, 2011 - xiv, 475 p. : ill. (some col.) ; 26 cm.
Includes bibliographical references and index
Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index
9780521766586 (hbk.)
Microelectromechanical systems
Inertial navigation systems
BioMEMS
Inertial MEMS : principles and practice / Volker Kempe - Cambridge : Cambridge University Press, 2011 - xiv, 475 p. : ill. (some col.) ; 26 cm.
Includes bibliographical references and index
Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index
9780521766586 (hbk.)
Microelectromechanical systems
Inertial navigation systems
BioMEMS