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Inertial MEMS : principles and practice / Volker Kempe

By: Material type: TextTextPublication details: Cambridge : Cambridge University Press, 2011Description: xiv, 475 p. : ill. (some col.) ; 26 cmISBN:
  • 9780521766586 (hbk.)
Subject(s):
Contents:
Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index
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Holdings
Item type Current library Call number Copy number Status Date due Barcode
Open Shelf Open Shelf UMPLIB PEKAN TK7875 .K46 2011 (Browse shelf(Opens below)) 1 Available 0000071731

Includes bibliographical references and index

Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index

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