Chemical-mechanical polishing--fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
Chemical-mechanical polishing--fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. /
editors, S.V. Babu ... [et al.]
- Warrendale, PA : Materials Research Society, 2000
- ix, 281 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 566 .
- Materials Research Society symposia proceedings ; v. 566 .
Includes bibliographical references and index
9781558994737 1558994734
Electrolytic polishing--Congresses
Grinding and polishing--Congresses
Chemical mechanical planarization--Congresses
Includes bibliographical references and index
9781558994737 1558994734
Electrolytic polishing--Congresses
Grinding and polishing--Congresses
Chemical mechanical planarization--Congresses