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Chemical-mechanical polishing--fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A. / editors, S.V. Babu ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 566Publication details: Warrendale, PA : Materials Research Society, 2000Description: ix, 281 p. : ill. ; 24 cmISBN: - 9781558994737
- 1558994734
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TS654.5 .C44 2000 (Browse shelf(Opens below)) | 1 | Available | 0000068168 |
Includes bibliographical references and index