Materials, integration and technology for monolithic instruments : symposium held March 29-30, 2005, San Francisco, California, USA /
Materials, integration and technology for monolithic instruments : symposium held March 29-30, 2005, San Francisco, California, USA /
editors: Jeremy A. Theil ... [et al.]
- Warrendale, PA : Materials Research Society, 2005
- ix, 171 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 869 .
- Materials Research Society symposia proceedings ; v. 869 .
Includes bibliographical references and indexes
9781558998230 1558998233
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses
Includes bibliographical references and indexes
9781558998230 1558998233
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses