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Materials, integration and technology for monolithic instruments : symposium held March 29-30, 2005, San Francisco, California, USA / editors: Jeremy A. Theil ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 869Publication details: Warrendale, PA : Materials Research Society, 2005Description: ix, 171 p. : ill. ; 24 cmISBN: - 9781558998230
- 1558998233
- Semiconductors -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- Thin films -- Congresses
- Metallic films -- Congresses
- Metallizing -- Congresses
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.85 .M38 2005 (Browse shelf(Opens below)) | 1 | Available | 0000071747 |
Includes bibliographical references and indexes