Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. /
Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. /
editors, S.A. Campbell ... [et al.]
- Warrendale, PA : Materials Research Society, 2002
- 1 v. (various pagings) : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 670 .
- Materials Research Society symposia proceedings ; v. 670 .
Includes bibliographical references and indexes
9781558996069 1558996060
Integrated circuits--Ultra large scale integration--Materials--Congresses
Silicides--Congresses
Gate array circuits--Congresses
Electric leakage--Congresses
Includes bibliographical references and indexes
9781558996069 1558996060
Integrated circuits--Ultra large scale integration--Materials--Congresses
Silicides--Congresses
Gate array circuits--Congresses
Electric leakage--Congresses