Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A. / editors, S.A. Campbell ... [et al.]

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Material type: Text

TextSeries: Materials Research Society symposia proceedings ; v. 670Publication details: Warrendale, PA : Materials Research Society, 2002Description: 1 v. (various pagings) : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874.76 .G38 2002 (Browse shelf(Opens below))	1	Available		0000073067

Includes bibliographical references and indexes