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Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. /

Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / editors by Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko - Pittsburgh, PA : Materials Research Society, c1988 - xv, 509 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 101 . - Materials Research Society symposia proceedings .

Includes bibliographies references and index

ISBN: 9780931837692 0931837693

Subjects--Topical Terms:
Integrated circuits--Design and construction--Congresses
Lasers--Industrial applications--Congresses
Lasers in chemistry--Congresses

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