MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01291nam a2200301 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls000061833 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251125093716.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
120613t1988 paua f b 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780931837692 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0931837693 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201304021511 |
| Level of effort used to assign nonsubject heading access points |
jamie |
| -- |
201206131148 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7874 .L37 1988 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Laser and particle-beam chemical processing for microelectronics : |
| Remainder of title |
symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / |
| Statement of responsibility, etc. |
editors by Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Pittsburgh, PA : |
| Name of publisher, distributor, etc. |
Materials Research Society, |
| Date of publication, distribution, etc. |
c1988 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv, 509 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Materials Research Society symposium proceedings ; |
| Volume/sequential designation |
v. 101 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographies references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuits |
| General subdivision |
Design and construction |
| -- |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lasers |
| General subdivision |
Industrial applications |
| -- |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lasers in chemistry |
| General subdivision |
Congresses |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Ehrlich, Daniel J. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Higashi, Gregg S. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Oprysko, Modest M. |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Materials Research Society symposia proceedings |