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Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A. /

Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Wei Zhu ... [et al.] - Warrendale, Pa. : Materials Research Society, 1998 - xi, 207 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 509 . - Materials Research Society symposium proceedings ; v. 509 .

Includes bibliographical references and indexes

ISBN: 9781558994157 1558994157

Subjects--Topical Terms:
Vacuum microelectronics--Congresses
Thin films--Congresses
Field emission cathodes--Congresses
Ion implantation--Congresses

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