Materials issues in vacuum microelectronics : symposium held April 13-16, 1998, San Francisco, California, U.S.A. / editors, Wei Zhu ... [et al.]
Material type:
TextSeries: Materials Research Society symposium proceedings ; v. 509Publication details: Warrendale, Pa. : Materials Research Society, 1998Description: xi, 207 p. : ill. ; 24 cmISBN: - 9781558994157
- 1558994157
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
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UMPLIB PEKAN | TK7874 .M38 1998 (Browse shelf(Opens below)) | 1 | Available | 0000071762 |
Includes bibliographical references and indexes