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Gettering and defect engineering in semiconductor technology XIV : selected papers from the 14th International Biannual Meeting on Gettering and Defect Engineering in Semiconductor, (GADEST2011) : September 25-30, 2011, Loipersdorf (Furstenfeld), Austria) /

Gettering and defect engineering in semiconductor technology XIV : selected papers from the 14th International Biannual Meeting on Gettering and Defect Engineering in Semiconductor, (GADEST2011) : September 25-30, 2011, Loipersdorf (Furstenfeld), Austria) / Gettering and defect engineering in semiconductor technology 14 GADEST 2011 edited by W. Jantsch, F. Schaffler - Durnten-Zuerich, Switzerland : TTP, c2011 - xii, 520 p. : ill. ; 25 cm. - Solid state phenomena ; v. 178 . - Solid state phenomena ; v. 178 .

Includes bibliographical references and index

ISBN: 9783037852323

Subjects--Topical Terms:
Semiconductors--Congresses
Getters--Congresses

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