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MEMS : fundamental technology and applications /

MEMS : fundamental technology and applications / edited by Vikas Choudhary, Krzysztof Iniewski - Boca Raton, FL : CRC Press, c2013 - xxii, 456 p. : ill. ; 26 cm. - Devices, circuits, and systems .

Includes bibliographical references and index

ISBN: 9781466515819 (hbk.)

Subjects--Topical Terms:
Microelectromechanical systems
Microelectronic packaging

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