MEMS : fundamental technology and applications / edited by Vikas Choudhary, Krzysztof Iniewski

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Material type: Text

TextSeries: Devices, circuits, and systemsPublication details: Boca Raton, FL : CRC Press, c2013Description: xxii, 456 p. : ill. ; 26 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .M46 2013 (Browse shelf(Opens below))	1	Available		0000092608

Includes bibliographical references and index